Characteristics of Novel Rotational Magnetron Sputtering Plasma Sources with Various Magnet Arrangements for Target Utilization Saving Resources; 2022年10月 発表情報; Advances in Materials Science Research, edited by M.C. Wythers, Nova Science Publishers, New York, 2022, 56, Chapter 5, 243-272 著者; Y.Ohtsu, M. Amzad Hossain and J. Schulze
Development of Novel RF Sputtering Plasma Source and Preparation of Al-Doped ZnO Thin Films for Transparent Conductive Oxide Applications; 2019年09月 発表情報; ZnO Thin Films: Properties, Performance and Applications, Chapter 6, NOVA Science Publishers, editor Paolo Mele, 193-208 著者; Yasunori Ohtsu and Takashi Sumiyama
Physics of High-Density Radio Frequency Capacitively Coupled Plasma with Various Electrodes and Its Applications; 2019年02月 発表情報; Plasma Science and Technology - Basic Fundamentals and Modern Applications, IntechOpen, Chapter 11, 2019 著者; Yasunori Ohtsu
Preparation of Zirconium Oxide Thin Film by Plasma Coating Method and its Hydrophobic Nature; 2012年06月 発表情報; Zirconium: Characteristics, Technology and Performance, Editors: Lucy M. King and Kathy E. Allen, Nova Science Publishers (2012)Chapter,1, 1-26 著者; Y.Ohtsu
Effect of multi-cusp magnetic fields to generate a high-density hydrogen plasma inside a low pressure H_2 cylindrical hollow cathode discharge; 2024年09月 発表情報; Vacuum, 227, 113459 著者; Md Hasibul Islam, Takeshi Uchida, Julian Schulze and Yasunori Ohtsu
Characteristics of a hybrid radio-frequency capacitively and inductively coupled plasma using hydrogen gas; 2024年07月 発表情報; Journal of Vacuum Science and Technlogy B, 42, 4, 044204(8pp) 著者; Yasunori Ohtsu, Tatsuo Tabaru and Julian Schulze
Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets; 2024年05月 発表情報; J. Vac. Sci. Technol. A, 42, 3, 033011(9pp) 著者; Yasunori Ohtsu, Takeshi Uchida, Ryohei Kuno and Julian Schulze
Spatial distributions of the ion flux in a capacitive hydrogen RF discharge using a hollow cathode with double toroidal grooves enclosed by magnets; 2023年06月 発表情報; Japanese Journal of Applied Physics, Special Issue: Plasma Processing (ICRP2022), 62, SL, SL1017-1-7 著者; Yasunori Ohtsu, Hokuto Hiwatashi and Julian Schulze
Spatial structures of rf ring-shaped magnetized sputtering plasmas with two facing cylindrical ZnO/Al2O3 targets; 2023年04月 発表情報; Jpn. J. Appl. Phys., 62, SI1007 著者; Yasunori Ohtsu, Kousuke Hara, Shoma Imoto, Julian Schulze, Takeshi Yasunaga and Yasuyuki Ikegami
Temporal evolution of the ion flux to the target in rotational RF multi-magnetron plasma; 2022年08月 発表情報; J. Vac. Sci. Technol. A, 40, 5, 053006(9pp) 著者; Yasunori Ohtsu, Koya Yasuda, and Julian Schulze
Development of a cruciform radio-frequency closed magnetron sputtering source including four sectorial magnetron sputtering discharges for uniform target utilization; 2022年08月 発表情報; Vacuum 202(2022)111184(7pp) 著者; Koya Yasuda, Yasunori Ohtsu and Julian Schulze
Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al_2O_3 - ZnO targets; 2022年04月 発表情報; Japanese Journal of Applied Physics, 61, SI, pp.SI1005(2022) 著者; Yasunori OHTSU, Godai Sakata, Julian Schulze, Takeshi Yasunaga and Yasuyuki Ikegami
Properties of AZO thin films prepared by stationary and rotating RF magnetized plasma sputtering source; 2022年01月 発表情報; AIP Advances, 12, 1, 015224-1-9 著者; Md. Amzad Hossain, Md. Abdul Majed Patwary, Md. Mustafizur Rahman, Yasunori Ohtsu
Preparation of water-repellent film on a plastic plate by unbalanced radio-frequency magnetron plasma sputtering using PTFE target for a next-generation automobile window; 2021年10月 発表情報; Plasma Chemistry and Plasma Processing, 41, pp.1631-1646 (2021), 41, 6, 1631-1646 著者; Yasunori Ohtsu, Yuta Ino, Yuki Fujio, Tatsuo Tabaru, Takeshi Yasunaga and Yasuyuki Ikegami
Characteristics of a radio frequency magnetized double-ring-shaped hollow cathode plasma source with permanent magnets for high-density hydrogen plasma generation; 2021年08月 発表情報; Vacuum, 193, 110531-1-9 著者; Yasunori Ohtsu, Shoma Imoto, Shunya Takemura, Julian Schulze
Development of rotational maze-shaped RF magnetron plasma for successful target utilization and the thin film preparation; 2021年01月 発表情報; Japanese Journal of Applied Physics, Special Issue: Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials, 60, SA, SAAB01-1-7 著者; Yasunori Ohtsu, Rei Tanaka and Takahiro Nakashima
Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization; 2020年11月 発表情報; Vacuum, In progress (November 2020), 181, 109593-1-10 著者; Yasunori Ohtsu, Takahiro Nakashima, Rei Tanaka and Julian Schulze
Spatial structure of radio-frequency capacitive discharge plasma with ring-shaped hollow electrode using Ar and O2 mixture gases; 2019年08月 発表情報; Journal of Physics D: Applied Physics, 52, 35, 355202-1-7 著者; Yasunori Ohtsu, Masaya Takasaki and Julian Schulze
Treatment of a polycarbonate plate for a next-generation vehicle window
by radio frequency magnetron plasma sputtering using a PVDF target; 2019年06月 発表情報; Japanese Journal of Applied Physics, 58, SE, SEED03-1-6 著者; Yasunori Ohtsu , Yusuke Takada, Kosei Sugawara, Yuki Fujio, and Tatsuo Tabaru
Observation of ring–shaped pulsed DC discharge plasma source using single pole magnet setups for material processing; 2019年06月 発表情報; Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology, 174, 5-6, 380-396 著者; Md. Amzad Hossain, M. A. Majed Patwary, M. M. Rahman Bhuiyan, Yutaro
Nakamura, Kosei Sugawara and Yasunori Ohtsu
Outer Ring-Shaped Radio Frequency Magnetized Plasma Source for Target Utilization in Specific Area; 2018年08月 発表情報; IEEE TRANSACTIONS ON PLASMA SCIENCE, 46, 8, 2894-2900 著者; Md. Amzad Hossain and Yasunori Ohtsu
Atmospheric-pressure plasma jet system for silicon etching without fluorocarbon gas feed; 2018年01月 発表情報; Japanese Journal of Applied Physics, (2018), 57, 1, 01AB01-1-4 著者; Yasunori Ohtsu and Kenta Nagamatsu
RF magnetized ring-shaped plasma for target utilization obtained with circular magnet monopole arrangement; 2018年01月 発表情報; Japanese Journal of Applied Physics, 57, 01AA05(7pp) 著者; Md. Amzad Hossain and Yasunori Ohtsu
Rotational cross-shaped magnetized radio-frequency sputtering plasma source for uniform circular target utilization; 2017年11月 発表情報; Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 35, 061312(6pp) 著者; Tsubasa Ide, Md. Amzad Hossain, Yutaro Nakamura and Yasunori Ohtsu
Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing; 2017年09月 発表情報; Plasma Chem Plasma Process,(2017)., 37, 6, 1663-1677 著者; Md. Amzad Hossain, Yasunori Ohtsu and Tatsuo Tabaru
Spatial structure of radio frequency ring-shaped magnetized discharge sputtering plasma using two facing ZnO/Al2O3 cylindrical targets for Al-doped ZnO thin film preparation; 2017年05月 発表情報; AIP Advances, 7, 055310(8pp) 著者; Takashi Sumiyama, Takaya Fukumoto, Yasunori Ohtsu, and Tatsuo Tabaru
Plasma characteristics and target erosion profile of racetrack-shaped RF magnetron plasma with weak rubber magnets for full circular target utilization; 2016年11月 発表情報; Surface & Coatings Technology, 307, pp.1134-1138 著者; Yasunori Ohtsu, Shohei Tsuruta, Tatsuo Tabaru, Morito Akiyama
High-density radio-frequency magnetized plasma sputtering source with rotational square-shaped arrangement of rod magnets for uniform target utilization; 2016年04月 発表情報; Vacuum, 128, 219-225 著者; Md. Amzad Hossain, T. Ide, K. Ikari, Y. Ohtsu
Capacitive radio frequency discharges with a single ring-shaped narrow trench of
various depths to enhance the plasma density and lateral uniformity; 2016年03月 発表情報; PHYSICS OF PLASMAS, 23, 3, 033510(7pp) 著者; Y. Ohtsu, N. Matsumoto, J. Schulze and E. Schuengel
Sustaining mechanism and spatial structure of high-density ring-shaped hollow cuspate magnetized rf plasma for low-pressure plasma processing; 2015年05月 発表情報; Plasma Sources Science and Technology, Special Issue on Electron heating in technological plasmas, 24, 3, 034005(9pp) 著者; Y.Ohtsu and T. Yanagise
Observation of radio frequency ring-shaped hollow cathode discharge plasma with MgO and Al electrodes for plasma processing; 2014年08月 発表情報; Journal of Vacuum Science and Technology A, 32, 3, 031304-1-031304-6 著者; Y. Ohtsu, N. Matsumoto
Production of radio frequency magnetron plasma by monopole arrangement of magnets for target uniform utilization; 2014年04月 発表情報; Vacuum, 101, 403-407 著者; Y. Ohtsu, M. Shigyo, M. Akiyama and T. Tabaru
Production of High-Density Radio Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench-Shapes; 2013年08月 発表情報; IEEE TRANSACTIONS ON PLASMA SCIENCE, Special Issue on Ion Sources and Their Applications, 41, 8, 1856-1861 著者; Y.Ohtsu,Y.Yahata, J.Kagami, Y.Kawashimo and T.Takeuchi
Criteria of radio-frequency ring-shaped hollow cathode discharge using H2 and Ar gases for plasma processing; 2013年01月 発表情報; J.Appl.Phys., 113, 3, 033302-1-033302-5 著者; Y.Ohtsu and Y.Kawasaki
Production of Low Electron Temperature Plasma and Coating of Carbon-Related Water Repellent Films on Plastic Plate; 2012年07月 発表情報; IEEE Trans. Plasma Science., Special Issue on Carbon-Related Materials Processing by Plasma Technologies,, 40, 7, 1809-1814 著者; Y.Ohtsu and K.Kihara
A comparison of microwave irradiation, electric, and hybrid heating for medical plastic-waste treatment; 2011年06月 発表情報; Journal of Renewable and Sustainable Energy, 3, 3, 033106-1-033106-7 著者; Y.Ohtsu, K.Onoda, H.Kawashita and H.Urasaki
Preparation of Water-Repellent Thin Film with Inductive Plasma using C2H2F2/Ar gases and Investigation of Its Adhesion by Positively Pulse-Biasing; 2011年04月 発表情報; Trans. Mater. Res. Soc. Jpn, 36, 1, 95-98 著者; Y.Ohtsu, N.Wada, T.Misawa
Production of Dual Frequency Sputtering Plasma for Preparation of Aluminum Nitride Thin Films; 2011年04月 発表情報; Trans. Mater. Res. Soc. Jpn,, 36, 1, 99-102 著者; Y.Ohtsu, K.Hino, T.Misawa, M.Akiyama and K.Yukimura
A simple hollow-probe for monitoring ion-beam energy in processing plasmas; 2010年12月 発表情報; Meas. Sci. Technol., 21, 12, 125405-1-125405-5 著者; Y.Ohtsu and N.Wakita
Development of high-density radio frequency plasma source with a ring-shaped trench hollow electrode for dry processing; 2010年08月 発表情報; Plasma Sources Science and Technology, 19, 4, 045012-1-045012-6 著者; Y.Ohtsu and H.Urasaki
Influence of Xe Gas Concentration on Plasma Parameters and Luminance Characteristics in Fluorescent Lamps driven by an Inductively Coupled Radio Frequency Discharge Using Ne / Xe Mixture Gases; 2010年06月 発表情報; Journal of Light and Visual Environment, 34, 1, 10-15 著者; H.Kashiwazaki, T.Kajiwara, H.Fujita and Y.Ohtsu
Development of novel hybrid microwave-heater reactor for paper-based waste treatment; 2010年04月 発表情報; Journal of Material Cycles and Waste Management, 12, 1, 25-29 著者; Yasunori Ohtsu, Ryuzo Yamada Hiroshi Urasaki, Tatsuya Misawa, Sebastian Popescu and Hiroharu Fujita
INFLUENCE OF INTERNAL PULSED CURRENT ON THE SINTERING BEHAVIOR OF PULSED CURRENT SINTERING PROCESS; 2010年01月 発表情報; Materials Science Forum, 638-642, 2109-2114 著者; T. Misawa, N.Shikatani, Y. Kawakami, T. Enjoji and Y. Ohtsu
Production of capacitively coupled atmospheric plasma jet with multiring-electrodes for the medical plasma tool; 2009年11月 発表情報; IEEE Trans. Plasma Science, 37, 11, 2221-2227 著者; Yasunori Ohtsu and Shigenori Tanaka
Two-Dimensional Spatial Structure of Inductively Coupled Plasma with One Internal Loop Antenna; 2009年10月 発表情報; J. Plasma Fusion Res. SERIES, 8, 1291-1294 著者; Y.Ohtsu, K.Aramaki and H.Fujita
Production of high-density capacitively coupled plasma with RF multi-hollow cathode and/or high secondary electron emission for DLC film preparation; 2009年10月 発表情報; Plasma Process and Polymer, 6, S1, S458-S461 著者; Yasunori Ohtsu, Chisa Nakamura, Tatsuya Misawa, Hiroharu Fujita, Morito Akiyama and Ken Yukimura
Improvement of a dual frequency sputtering device for higher deposition rates of protective zirconium oxide films on ceramics; 2009年07月 発表情報; Vacuum, 83, 1364-1367 著者; Yasunori Ohtsu, Yuzuru Hino, Hiroharu Fujita, Morito Akiyama, Ken Yukimura
Observation of internal pulsed current flow through the ZnO specimen in the spark plasma sintering method; 2009年03月 発表情報; Journal of Materials Science, 44, 1641-1651 著者; T.Misawa, N.Shikatani, Y.Kawakami, T. Enjoji, Y.Ohtsu and H.Fujita
Preparation of water-repellent thin film by RF pulse-modulated plasma CVD using C_2H_2F_2 gas; 2008年09月 発表情報; Surf. Coat. Technol., 202, 5367-5369 著者; Y. Ohtsu, Y.Masuda, S.Yazaki, T.Misawa and H. Fujita
Competing inactivation agents of bacteria spores in radio-frequency oxygen plasma; 2008年06月 発表情報; Plasma Processes & Polymers, 5, 4, 350-358 著者; D.VICOVEANU, S.POPESCU, Y.OHTSU, and H.FUJITA
Production of high-density capacitive plasma by the effects of multi-hollow cathode discharge and high-secondary-electron-emissio; 2008年04月 発表情報; Applied Physic Letters, 92, 17, 171501-1-171501-3 著者; Y.Ohtsu and H.Fujita
Pulsed Discharge Effects on Bacteria Inactivation in Low-Pressure Radio-Frequency Oxygen Plasma; 2008年02月 発表情報; Jpn. J. Appl. Phys., 47, 2, 1130-1135 著者; Dragos VICOVEANU, Yasunori OHTSU, and Hiroharu FUJITA
Langmuir probe data analysis for a magnetized inductive radio-frequency discharge; 2007年 発表情報; J.Appl.Phys., 102, 093022-1-093302-7 著者; Sebastian POPESCU, Yasunori OHTSU, and Hiroharu FUJITA,
Spatial Behavior of the Plasma Potential in a Magnetized Radio-Frequency Discharge from Emissive Probe Data; 2007年 発表情報; Journal of the Physical Society of Japan, 76, 9, 094501-1-094501-4 著者; Sebastian POPESCU, Yasunori OHTSU, and Hiroharu FUJITA
Ultra-Water Repellency of Films Prepared by Capacitively Coupled C2H2F2/Ar Discharge Plasma; 2007年 発表情報; Jpn. J. Appl. Phys., 46, 27, L679-L681 著者; Yasunori.Ohtsu, NobuhisaYamagami and Hiroharu Fujita
Effect of negative pulsed high-voltage-bias on diamond-like carbon thin film preparation using capacitively coupled radio frequency plasma chemical vapor deposition; 2007年 発表情報; Surf. Coat. Tehcnol., 201, 6674-6677 著者; Y.Ohtsu, H.Noda, C.Nakamura, H.Fujita, K.Yukimura, M.Akiyama and C.Diplasu
Influence of ion-bombardment-energy on thin zirconium oxide films prepared by dual frequency oxygen plasma sputtering; 2007年 発表情報; Surf. Coat. Technol., 201, 6627-6630 著者; Y.Ohtsu,Y.Hino, H.Fujita, K.Yukimura and M.Akiyama
Ar/O2 gas pressure dependences of a pulsed zirconium arc and extracted ion characteristics; 2007年 発表情報; Surf. Coat. Technol., 201, 6550-6552 著者; Ken Yukimura, Hiroyuki Ono, Shuhei Akashi, Xinxin Ma, Yasunori Ohtsu, Hiroharu Fujita and Keiji Nakamura
Current-free double-layer formation in inductively coupled plasma in a uniform magnetic field; 2006年 発表情報; Phys. Rev. E, 73, 066406-1-066405-8 著者; "S. Popescu, Y. Ohtsu,
and H. Fujita"
Influences of oxide material on high density plasma production using capacitively coupled discharge; 2006年 発表情報; Thin Solid Films, 506-507, 545-549 著者; "Y.Ohtsu, T.Shimazoe,
T.Misawa and H.Fujita"
Ar/O2 gas pressure dependence of atomic concentration of zirconia prepared by zirconium pulse arc PBII& D; 2006年 発表情報; "Nuclear Instruments and Methods
in Physics Research Section B", 242, 318-320 著者; "K.Yukimura,
H.Yoshinaga,
Y.Ohtsu, H.Fujita, K.Nakamura and X.Ma"
Preparation of zirconium oxide thin film using inductively coupled oxygen plasma sputtering; 2005年 発表情報; SURFACE AND COATINGS TECHNOLOGY, 196, 1/3, 81-84 著者; Ohtsu, Y / Egami, M / Fujita, H / Yukimura, K
Energy Distribution of Ions Incident onto a Dc-Biased Substrate in Electron Cyclotron Resonance Sputtering Plasma for SrTiO~3 Thin Film Preparation; 2004年 発表情報; JAPANESE JOURNAL OF APPLIED PHYSICS PART 1 REGULAR PAPERS SHORT NOTES AND REVIEW PAPERS, 43, 1, 328-331 著者; Ohtsu, Y / Fujita, H / Niino, A / Matsumoto, T / Miyake, S
Energy distribution functions of ions impinging on substrate in microwave plasma; 2004年 発表情報; JOURNAL OF PHYSICS -D- APPLIED PHYSICS, 37, 3, 438-444 著者; Mesko, M / Cicman, P / Ohtsu, Y / Fujita, H / Kudrle, V
Influences of gap distance on plasma characteristics in narrow gap capacitively coupled radio-frequency discharge; 2004年 発表情報; Jpn.J.Appl.Phys.,, 43, 2, 795-799 著者; Y.Ohtsu and H.Fujita
Influence of Substrate Biasing on (Ba,Sr)TiO~3 Films Prepared by Electron Cyclotron Resonance Plasma Sputtering; 2004年 発表情報; JAPANESE JOURNAL OF APPLIED PHYSICS PART 1 REGULAR PAPERS SHORT NOTES AND REVIEW PAPERS, 43, 3, 1144-1148 著者; Matsumoto, T / Niino, A / Ohtsu, Y / Misawa, T / Yonesu, A / Fujita, H / Miyake, S
High ozone generation with a high-dielectric constant material; 2004年 発表情報; Jpn.J.Appl.Phys.,, 43, 7, 4368-4372 著者; M.Toyofuku (D 3), Y.Ohtsu and H.Fujita
Measurement of ion temperature in magnetized inductively coupled plasma with external helical antenna; 2004年 発表情報; PHYSICS LETTERS A, 327, 4, 327-331 著者; Mihaila, I / Ohtsu, Y / Fujita, H
Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide; 2004年 発表情報; APPLIED PHYSICS LETTERS, 85, 21, 4875-4877 著者; Ohtsu, Y / Fujita, H
Time-Averaged Energy Distribution Function of Ions Impacted on an RF-biased Substrate in Electron Cyclotron Resonance Microwave Plasma; 2003年 発表情報; JAPANESE JOURNAL OF APPLIED PHYSICS PART 1 REGULAR PAPERS SHORT NOTES AND REVIEW PAPERS, 42, 12, 7552-7556 著者; Ohtsu, Y / Yoshinaga, K / Fujita, H
Annular profile of dust density near RF powered electrode in a capacitively coupled plasma; 2002年04月 発表情報; Jpn.J.Appl.Phys., 41, 4, 2195-2198 著者; Y.Ohtsu and H.Fujita,
Energy distribution functions of ions impacted on a negatively biased substrate in an electron cyclotron resonance microwave plasma; 1999年07月 発表情報; Jpn.J.Appl.Phys., 38, 7, 4393-4396 著者; Y.Ohtsu, K.Mori and H.Fujita
A new sputtering device of radio-frequency magnetron discharge using a rectangular hollow-shaped electrode; 1998年04月 発表情報; Rev. Sci.Instrum., 69, 4, 1833-1836 著者; Y.Ohtsu, Y.Tsurume and H.Fujita,
Measurement of ion energy distribution functions in an radio frequency plasma excited with an m=0 mode helical antenna and thin film preparation; 1997年07月 発表情報; Jpn.J.Appl.Phys., 36, 7, 4620-4624 著者; Y.Ohtsu, G.Tochitani, H.Fujita, J.Zhang, Y.Setsuhara and H.Fujita
Potential oscillations in an electronegative plasma driven by an asymmetry RF discharge; 1997年07月 発表情報; Jpn.J.Appl.Phys., 36, 7, 4722-4727 著者; M.M.Nasser, Y.Ohtsu, G.Tochitani and H.Fujita
Ion collection by a hollow probe in ECR microwave plasma under a divergent magnetic field; 1997年05月 発表情報; Jpn.J.Appl.Phys., 36, 5, 2894-2895 著者; Y.Ohtsu, K.Kinoshita and H.Fujita
Temporal evolution of charged particles in a radio frequency afterglow plasma containing negative ions; 1996年08月 発表情報; Jpn.J.Appl.Phys., 35, 8, 4494-4497 著者; Y.Ohtsu, T.Seki and H.Fujita
Spatial structure of electrons and fluorine atoms in a CF4 RF magnetron plasma; 1996年05月 発表情報; Plasma Sources Sci Technol., 5, 5, 344-348 著者; Y.Ohtsu, H.Matsuo and H.Fujita
Potential structure in asymmetrical radio frequency discharges containing negative ions “; 1994年09月 発表情報; Phys.Lett. A, 193, 9, 94-96 著者; Y.Okuno, Y.Ohtsu and H.Fujita
CF3, CF2 and CF radical measurements in RF CHF3 etching plasma using infrared diode laser absorption spectroscopy; 1994年07月 発表情報; Jpn.J.Appl.Phys., 33, 7, 4298-4302 著者; K.Maruyama. K.Ohkouchi, Y.Ohtsu and T.Goto
Effect of downstream magnetic field collimation on ion behavior in electron cyclotron resonance microwave plasma; 1994年06月 発表情報; IEEE Trans. Plasma Sci., 22, 6, 253-259 著者; Y.Okuno, Y.Ohtsu and H.Fujita,
Electron acceleration resonant with sheath motion in a low-pressure radio frequency discharge; 1994年03月 発表情報; Appl.Phys.Lett., 64, 3, 1623-1625 著者; Y.Okuno, Y.Ohtsu and H.Fujita
Two-dimensional ion velocity distribution functions in electron cyclotron resonance plasma under a divergent magnetic field; 1993年11月 発表情報; J.Appl.Phys.,, 74, 11, 5990-5996 著者; Y.Okuno, Y.Ohtsu and H.Fujita
Measurement of ion temperature in electron cyclotron resonance plasma; 1993年11月 発表情報; Jpn.J.Appl.Phys, 32, 11, L1698-L1700 著者; Y.Okuno, Y.Ohtsu, H.Fujita, W.Chen, S.Miyake
Effect of RF-biased electrode on microwave plasma; 1993年06月 発表情報; Jpn.J.Appl.Phys., 32, 6, 2873-2877 著者; Y.Ohtsu, Y.Okuno and H.Fujita
Observation of radio-frequency discharges at various frequencies; 1993年03月 発表情報; J.Appl.Phys., 73, 3, 2155-2159 著者; Y.Ohtsu, Y.Okuno and H.Fujita
Measurement of electron energy distribution function in an asymmetric radio frequency discharge plasma; 1993年02月 発表情報; J.Appl.Phys., 73, 2, 1612-1616 著者; Y.Okuno, Y.Ohtsu, C.Komatsu and H.Fujita
Measurement of electron energy distribution function in a low pressure rf discharge plasma; 1992年05月 発表情報; Jpn.J.Appl.Phys,, 31, 5, 1503-1504 著者; S.Yagura, Y.Okuno, Y.Ohtsu and H.Fujita
Modulation of electron velocity distribution function by moving cathode sheath in a low pressure rf discharge; 1992年04月 発表情報; Jpn.J.Appl.Phys, 31, 4, 1194-1198 著者; Y.Okuno, Y.Ohtsu and H.Fujita
Control of plasma parameters and electric fields in a microwave-rf hybrid plasma; 1991年05月 発表情報; J.Appl.Phys, 67, 5, 6114-6117 著者; 藤田寛治、奥野喜裕、大津康徳、矢倉信也
Development of Deuterium Negative Ion Sources and its Database Construction; 2003年 発表情報; Annual Report of National Institute for Fusion Science, April 2002-March 2003,p223. 著者; Fukumasa, O., Naitou, H., Sakiyama, S. Tauchi, Y., Sawada, K., Fujita, H. Ohtsu, Y.
Hamabe, M., Takeiri, Y.,
Development of a New Type Pellet Injector with Continuously Variable System of Pellet Size for
LHD; 2003年 発表情報; Annual Report of National Institute for Fusion Science, April 2002-March 2003,p231. 著者; Sato, K.N., Imada, S., Mase, A., Sakakita, H., Fujita, H., Ohtsu, Y., Misawa, T.,
Sakamoto, R., Yamada, H., Yamazaki, K.
Basic Process of Solid Hydrogen Ablation by Plasma; 2003年 発表情報; Annual Report of National Institute for Fusion Science, April 2002-March 2003,p308. 著者;
Fujita, H. Ohtsu, Y., Misawa, T., Sato, K.N., Yoshimura, S,
Impact of like-pole-aligned hybrid MCMF on hydrogen plasma density inside a low-pressure RF driven CCP discharge with a hollow cathode; 2024年11月 発表情報; Proceedings of The 45th International Symposium on Dry Process (DPS2024), P-45, 119-120 著者; Md. H. Islam and Y. Ohtsu
Production of a hybrid RF capacitively and inductively coupled plasma using CH4
and H mixture gases for preparing carbon nanostructures; 2024年11月 発表情報; Proceedings of The 45th International Symposium on Dry Process (DPS2024), P-46, 121-122 著者; Y. Ohtsu, T. Tabaru and J. Schulze
Enhancement of high-density hydrogen-plasma production using cylindrical-shaped hollow cathode at a lower H2 gas pressure by multi-cusp magnetic fields; 2024年03月 発表情報; 2024年第71回応用物理学会春季学術講演会22p-12G-12 著者; Md Hasibul Islam, Takeshi Uchida and Yasunori Ohtsu
Characteristics of RF hybrid-plasma using hydrogen gas; 2024年03月 発表情報; Proc. ISPlasma2024//IC-PLANTS2024/APSPT-13, Nagoya Univ. 2024.3.5 著者; Yasunori Ohtsu, Tatsuo Tabaru and Julian Schulze
Production of high-density hydrogen plasma by RF magnetized hollow cathode discharge with magnet; 2023年11月 発表情報; Proc. 44th International Symposium on Dry Process (DPS2023), Nagoya, Nov.21-22,, 44, 107-108 (P-32) 著者; Y. Ohtsu, T. Uchida, R. Kuno and J. Schulze
Production of radio-frequency hybrid-discharge plasma using hydrogen gas for thin film preparation; 2023年10月 発表情報; Bulletin of the American Physical Society, 76th Annual Gaseous Electronics Conference, IT4.36 著者; Yasunori Otsu and Tatsuo Tabaru
Spatial structures of rf ring-shaped magnetized sputtering plasma with two facing cylindrical ZnO/
Al2O3 targets; 2022年11月 発表情報; Proc. of 43rd International Symposium on Dry process, Osaka, Nov. 24-25, P-18, 71-72 著者; Y. Ohtsu, K. Hara, S. Imoto, J. Schulze, T. Yasunaga, Y. Ikegami
Spatial distributions of hydrogen RF discharge plasma using a hollow cathode with double toroidal grooves combined with magnets; 2022年10月 発表情報; Proc. 11th International Conference on Reactive Plasmas (ICRP-11), 2022 Gaseous Electronics Conference (GEC 2022), HW6.00042, 231-232 著者; Yasunori Ohtsu, Hokuto Hiwatashi and Julian Schulze
Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al2O3-ZnO targets; 2021年11月 発表情報; 42th International Symposium on Dry Process(DPS2021), P-24(2021.11.18) 著者; Y.Ohtsu, G. Sakata, J. Schulze, T. Yasunaga and Y. Ikegami
Development of rotational maze-shaped RF magnetron plasma for successful target utilization and the thin film preparation; 2020年03月 発表情報; ISPlasma2020/IC-PLANTS2020, Nagoya, March 10, 10P2-06 著者; Yasunori Ohtsu, Rei Tanaka and Takahiro Nakashima
Production of double ring-shaped magnetized radio-frequency hydrogen high-density plasma; 2019年11月 発表情報; 2019 International Symposium on Dry Process, P-32, 119-120 著者; Y. Ohtsu, K. Kawabata, K. Aso and J. Schulze
Characteristics of Aluminum doped zinc oxide film prepared using RF magnetized plasma sputtering source with square-shaped magnet setup; 2019年03月 発表情報; Proc. 11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials, 19pE19O 著者; M. A. Hossain, Y.Nakamura, K. Sugawara and Y.Ohtsu
Treatment of polycarbonate plate for next-generation vehicle window by radio frequency magnetron plasma sputtering with an arrangement of cylindrical magnets; 2018年11月 発表情報; Proc. of 40th anniversary International Symposium on Dry Process (DPS2018), 40, 151-152 著者; Y. Ohtsu, Y. Takada, K. Sugawara, Y. Fujio and T. Tabaru
“Preparation of
aluminum doped zinc oxide film by radio-frequency magnetized plasma
sputtering source with square-shaped rod magnets; 2018年06月 発表情報; 19th International Congress on Plasma Physics (ICPP 2018), Vancouver, Canada 著者; M. A. Hossain, Y. Nakamura, A. Sugawara, and Y. Ohtsu,
Ring-Shaped Plasma for Target Utilization in Specific Area by HiPIMS Source; 2017年11月 発表情報; 39th International Symposium on Dry Process, 2017, P-36, 39, 121-122 著者; Md. Amzad Hossain, Yasunori Ohtsu
Outer Ring-Shaped Magnetize Plasma by RF and HiPIMS Source; 2017年11月 発表情報; 70th Annual Gaseous Electronics Conference, Pittsburgh, USA, QR1-6, Bulletin of APS, 62, 1, 71 著者; Md. Amzad Hossain and Yasunori Ohtsu
Outer Circular Ring-Shaped RF Magnetized Plasma for Specific Area Target Utilization by Magnetic Monopole Arrangement; 2017年05月 発表情報; 44th International Conference on Plasma Science, WE Poster-5, 21-25 May 2017, Seton Hall Univ., USA 著者; Md. Amzad Hossain and Yasunori Ohtsu
RF Magnetized Ring-Shaped Plasma for Uniform Cu Target Utilization by Circular Magnets Monopole Arrangement; 2017年03月 発表情報; ISPlasma 2017, Chubu Univ. 著者; Md. Amzad Hossain and Yasunori Ohtsu
Surface treatment of silicon wafer by atmospheric pressure plasma jet with a tungsten rod coated by C2F4; 2017年03月 発表情報; ISPlasma 2017, Chubu Univ., 201703 著者; Yasunori Ohtsu and Kenta Nagamatsu
Preparation of Copper Thin Film by Radio Frequency Magnetized Plasma Sputtering Source with Gyratory Various Magnet Arrangements; 2016年12月 発表情報; 26th Annual Meeting of MRS-Japan 2016, C4-P20-010 著者; Y. Ohtsu , Md. Amzad Hossain, T. Ide and Y. Nakamura
Electrical and Structural Properties of Copper Thin Films Deposited by Novel RF Magnetized Plasma Sputtering with Gyratory Square-Shaped Arrangement by Bar Permanent Magnets; 2016年10月 発表情報; 69the Annual Gaseous Electronics Conference, October 10-14, 2016, Bulletin of the American Physical Society, 61, 9, 29, FT4-1 著者; Md. Amzad Hossain and Yasunori Ohtsu
Spatial structure of plasma density and electron temperature in capacitive RF discharges with a single ring-shaped narrow trench of various depths; 2016年10月 発表情報; 69th Annual Gaseous Electronics Conference, October 10-14, 2016, Bulletin of the American Physical Society, 61, 9, 46, HT6-60 著者; J. Schulze, E. Schuengel, N. Matsumoto, Y. Ohtsu
Development of High-Density RF Magnetized Sputtering Plasma Source with Square-Shaped Arrangement of Magnets for Uniform Target Utilization; 2016年03月 発表情報; 2016年第63回応用物理学会春季学術講演会、19p-P8-1、東工大、201603 著者; M. A. Hossain, K. Ikari , T. Ide, Y. Ohtsu
Characteristics of Ring-Shaped Hollow Cathode Plasma with a
Narrow Trench for High-density Capacitive Plasma Sources; 2015年09月 発表情報; The 10th Asian-European International Conference on Plasma Surface Engineering, Korea, P2-17, P2-17 著者; Yasunori Ohtsu, Naoki Matsumoto, Yuto Morita, Julian Schulze , Edmund Schuengel
Plasma characteristics and target erosion profile of racetrack-shaped RF magnetron plasma with weak rubber magnets for full circular target utilization; 2015年09月 発表情報; The 10th Asian-European International Conference on Plasma Surface Engineering, Korea, P2-18, P2-18 著者; Yasunori Ohtsu, Shohei Tsuruta, Tatsuo Tabaru and Morito Akiyama
Spatial structures of ring-shaped hollow cathode RF plasma with a single narrow trench for high-density plasma sources; 2015年09月 発表情報; The 76th JSAP Autumn meeting, 2015, Nagoya, 15p-PB2-45 著者; Yasunori Ohtsu, Naoki Matsumoto, Yuto Morita, Schulze Julian、Schuengel Edmund
PAPER AND PLASTIC-BASED WASTE NEUTRALIZATION USING MICROWAVE AND ELECTRIC ENERGY; 2014年07月 発表情報; The 14th International Balkan Workshop on Applied Physics and Materials Science, S5-L03, Constanta, Romania(2014.7.2-4) 著者; Sebastian POPESCU and Yasunori OHTSU
Characteristics of capacitively coupled collisional plasma with RF ring-shaped hollow electrode; 2014年02月 発表情報; 8th International Conference on Reactive Plasmas / 31st Symposium on Plasma
Processing(ICRP-8/SPP-31), Fukuoka, 6P-AM-S01-P05 (2014.2) 著者; Naoki Matsumoto and Yasunori Ohtsu
Development of racetrack-shaped RF magnetron sputtering plasma with rubber magnet for target uniform utilization; 2014年02月 発表情報; 8th International Conference on Reactive Plasmas / 31st Symposium on Plasma
Processing(ICRP-8/SPP-31), Fukuoka, 6P-AM-S01-P04(2014.2) 著者; Shohei Tsuruta and Yasunori Ohtsu
Production of High-Density RF Plasma Using Ring-Shaped Hollow Cathode for Material Processing; 2013年06月 発表情報; 5th International Workshop on Plasma Scientech for All Something (PLASAS-5), June 21 – 23, 2013, Tokyo Institute of Technology, Japan 著者; Y.Ohtsu
Wood Surface Treatment by Atmospheric RF Capacitively Coupled Plasma Jet; 2012年04月 発表情報; Proc. The 7th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-7), PL-07-01, 1-3 著者; Y.Ohtsu and M.Z.Hassan
Numerical simulation of rf capacitive coupled plasma with ring-shaped hollow cathode; 2012年03月 発表情報; Abstract of The 2nd AICS International Symposium, Kobe, 2012.3.1-2, 12P, 62 著者; Yasunori Ohtsu
Production of high-density capacitive-discharge plasma with ring-shaped hollow cathode for thin film preparation; 2010年07月 発表情報; Abstract of First International Conference on Fundamentals and Industrial Applications of HIPIMS, Sheffield, UK, 38 著者; Y. Ohtsu, H. Urasaki and T. Hotta
Production of High-Density Plasma with Plasma-Ring Discharge; 2010年02月 発表情報; Proc. 27th Symp. Plasma Processing, 129-130 著者; Yasunori Ohtsu, Hiroshi Urasaki, Tatsuya Misawa, Hiroharu Fujita
Characteristics of RF Capacitively Coupled Plasma with High-Secondary-Electron-Emission Electrode Materials for Mercury-Free Lamp; 2010年02月 発表情報; Proc. 27th Symp. Plasma Processing, Yokohama, 131-132 著者; Kazutoshi Kabashima, Tatsuya Misawa, Yasunori Ohtsu
Development of Frequency Plasma Sputtering Device for Preparation of High-Temperature Piezoelectric-Sensor Thin Films; 2010年02月 発表情報; Proc. 27th Symp. Plasma Processing, 193-194 著者; Shigenori Tanaka, Tatsuya Misawa, Yasunori Ohtsu, Morito Akiyama,
Preparation of Water-Repellent Thin Film with Low-Electron-Temperature Plasma CVD Using Mixture Gases of C2H2F2 and Ar; 2010年02月 発表情報; Proc. 27th Symp. Plasma Processing, 195-196 著者; Kiyoharu Kihara, Yasunori Ohtsu, Tatsuya Misawa,
Development of high-density plasma source produced by capacitive discharge with ring-shaped hollow electrode for thin film preparation; 2009年12月 発表情報; Proc. The Sixth Asia-Pacific International Symposium on the Basic and Application of Plasma Technology, 71-72 著者; Yasunori Ohtsu, Hiroshi Urasaki(M2) and Tomohiro Hotta(B4)
Preparation of Water-Repellent Thin Film with Inductive Plasma using C2H2F2/Ar gases and Investigation of Its Adhesion by Positively Pulse-Biasing; 2009年09月 発表情報; Abstract of 16th International Conference of Surface Modification of Materials by Ion Beams PC-56, 222-222 著者; Y.Ohtsu, N.Wada, T.Misawa and H.Fujita
Production of Dual Frequency Sputtering Plasma for Preparation of Aluminum Nitride Thin Films; 2009年09月 発表情報; Abstract of 16th International Conference of Surface Modification of Materials by Ion Beams PC-57, 223-223 著者; Y.Ohtsu, K.Hino, T.Misawa, H.Fujita, M.Akiyama and K.Yukimura
Development of high-density radio frequency plasma s ource with ring-shaped hollow electrode for dry processing; 2009年09月 発表情報; Proc. of 31 International Symposium on Dry process, 2-P25, 57-58 著者; Y.Ohtsu, H.Urasaki, T.Misawa and H.Fujita
Production of low-pressure high-density RF plasma using ring-shaped hollow cathode electrode; 2009年02月 発表情報; Proc. of Plasma Science Symposium 2009/The 26th Symposium on Plasma Processing, P2-54,pp.316-317., 316-317 著者; 浦崎浩史(M1)、三沢達也、大津康徳、藤田寛治
Production of Atmospheric Radio Frequency Plasma Source using Helical Coil; 2009年02月 発表情報; Proc. of Plasma Science Symposium 2009/The 26th Symposium on Plasma Processing,P2-56, pp.320-321., 320-321 著者; 椛島一稔(B4)、三沢達也、大津康徳
Production of Atmospheric Plasma Jet with Capacitively Coupled Discharge and its Application; 2009年02月 発表情報; Proc. of Plasma Science Symposium 2009/The 26th Symposium on Plasma Processing, P3-33, pp.480-481., 480-481 著者; S.Tanaka, T.Misawa and Y.Ohtsu
Preparation of water-repellent thin film with C2H2F2/Ar plasma and investigation of its adhesion; 2009年01月 発表情報; Proc. of The 2nd International Conference on Plasma Nanotechnology and Science (IC-PLANTS), Nagoya, (2009.1), P-05 著者; K.Wada, T.Misawa, Y.Ohtsu and H.Fujita,
Preparation of aluminum nitride thin film with dual frequency plasma sputtering; 2009年01月 発表情報; Proc. of The 2nd International Conference on Plasma Nanotechnology and Science (IC-PLANTS), Nagoya, (2009.1) P-13. 著者; K.Hino, T.Misawa, Y.Ohtsu, M.Akiyama and H.Fujita,
Observation of dielectric barrier discharge at various Xe/Ne mixture gas ratios; 2009年01月 発表情報; Proc. of The 2nd International Conference on Plasma Nanotechnology and Science (IC-PLANTS), Nagoya, (2009.1) P-19. 著者; T.Yamamura, T.Misawa, Y.Ohtsu and H.Fujita,
DEVELOPMENT OF MICROWAVE REACTOR FOR PAPER-BASED WASTE NEUTRALIZATION; 2008年10月 発表情報; Proc. of The 5th Asian-Pacific Landfill Symposium in Sapporo, October 22-24, 2008, 4B-4, pp.1-6.(CD-ROM), 1-6 著者; Yasunori Ohtsu, Ryuzo Yamada, Hiroshi Urasaki, Tatsuya Misawa, Sebastian Popescu and Hiroharu Fujita
Two-dimensional spatial structure of inductively coupled plasma with one internal loop antenna; 2008年09月 発表情報; Abstract of 2008 International Conference on Plasma Physics, Fukuoka, Sept.8-12, ESP・P2-194(2008)p282., 282 著者; Y.Ohtsu, K.Aramaki and H.Fujita,
High density capacitive plasma with multi-hollow cathode discharge and secondary electron emission; 2008年09月 発表情報; Abstract of 2008 International Conference on Plasma Physics, Fukuoka, Sept.8-12, ESP・P2-195(2008)p282., 282 著者; Y.Ohtsu, C.Nakamura, T.Misawa, H.Fujita, M.Akiyama,
Preparation of transparent repellent films on plastic plate by low temperature RF plasma using C_2H_2H_2 gas; 2008年09月 発表情報; Abstracts of The Eleventh International Conference on Plasma Surface Engineering, PO2021, (2008)p316., 316 著者; Y.Ohtsu, N.Wada, T.Misawa and H.Fujita
Inactivation of bacillus subtilis by atmospheric RF plasma for security and relief in life; 2008年09月 発表情報; Abstracts of The Eleventh International Conference on Plasma Surface Engineering, PO2075. (2008), p370., 370 著者; Y.Ohtsu, Y.Miyazaki and H.Fujita
Production of high-density capacitively coupled plasma with RF multi-hollow cathode and/or high secondary electron emission; 2008年09月 発表情報; Abstracts of The Eleventh International Conference on Plasma Surface Engineering, PO4058 (2008), p549., 549 著者; Y.Ohtsu, C.Nakamura, T.Misawa, H.Fujita, M.Akiyama and K.Yukimura,
Inactivation of bacillus subtilis by atmospheric barrier discharge plasma; 2008年01月 発表情報; Proc. of The 25th Symposium on Plasma Processing, Yamaguchi, 著者; Y.Ohtsu, Y.Miyazaki, T.Misawa and H.Fujita
Production of high-density capacitively coupled plasma with multi-hollow cathode effect and preparation of a-C:H thin films; 2008年01月 発表情報; Proc.of The 25th Symposium on Plasma Processing, Yamaguchi 著者; Y.Ohtsu, C.Nakamura, T.Misawa, H.Fujita, M.Akiyama and K.Yukimura
Production of high-density capacitively discharge plasma with multi-hollow cathode for DLC coating; 2007年12月 発表情報; The 18th Symposium of the Materials Research Society of Japan, Tokyo, 著者; Y.Ohtsu, C.Nakamura, T.Misawa, H.Fujita, M.Akiyama and K.Yukimura
Production of dielectric barrier discharge microplasmas at various oxides with high secondary electron emission and high dielectric constan; 2007年10月 発表情報; Abstract of The 4th International Workshop on Microplasmas, Taiwan, Oct. 28-31, FP-018, (2007)pp.57-58., 57-58 著者; Y.Ohtsu and H. Fujita
High Deposition Preparation of Zirconia Films by Optimization of Geometry in Dual Frequency Sputtering for Protective Layer of Ceramics; 2007年09月 発表情報; 9th International Workshop on Plasma-Based Ion Implantation & Deposition 著者; Y.Ohtsu, Y.Hino, H.Fujita, M.Akiyama and K.Yukimura
Production of high-density RF plasma with multi hollow cathode discharge for DLC coating; 2007年09月 発表情報; 9th International Workshop on Plasma-Based Ion Implantation & Deposition 著者; Y.Ohtsu, C.Nakamura, H.Fujita, M.Akiyama, T.Tabaru and K.Yukimura
Preparation of water-repellent film by RF plasma CVD using C2H2F2 gas; 2007年09月 発表情報; Abstract of Sixth Asian-European International Conference on Plasma Surface Engineering (AEPSE2007), Nagasaki, Sept.24-29, (2007) P1004,p101., -101 著者; Y.Ohtsu, Y.Masuda, S.Yazaki, T.Misawa and H.Fujita,
High-density plasma production by capacitively coupled discharge with multi-hollow cathode and secondary electron emission for DLC coating; 2007年09月 発表情報; Abstract of Sixth Asian-European International Conference on Plasma Surface Engineering (AEPSE2007), Nagasaki, Sept.24-29, (2007)P2009, p177., 177 著者; Y.Ohtsu, C.Nakamura, T.Misawa, H.Fujita. M.Akiyama, T.Tabaru and K.Yukimura
Plasma characteristics of atmospheric microplasma produced by high secondary electron-emission-material; 2007年08月 発表情報; 18th International Symposium on Plasma Chemistry 著者; Y. Ohtsu, N.Yamasaki and H.Fujita
Inactivation characteristics of Bacillus Subtilis in low pressure pulsed plasma; 2007年08月 発表情報; 18th International Symposium on Plasma Chemistry 著者; Dragos Vicoveanu, Yasunori Ohtsu, Hiroharu Fujita
High density plasma production with effects of hollow-cathode and high secondary-electron-emission for a-C: H thin film preparation; 2007年08月 発表情報; 18th International Symposium on Plasma Chemistry 著者; Y. Ohtsu, C.Nakamura, H.Fujita. M.Akiyama and T.Tabaru
Nonlinear spatial profiles of plasma parameters in a magnetized inductive radio-frequency discharge; 2007年07月 発表情報; 28th International Conference on Phenomena in Ionized Gases, 著者; S. Popescu*, Y. Ohtsu and H. Fujita
Plasma production using one turn internal loop antenna by means of radio frequency discharge; 2007年07月 発表情報; 28th International Conference on Phenomena in Ionized Gases, 著者; H.Fujita, K.Aramaki and Y.Ohtsu
Improvement in preparation of a-C:H thin films with RF plasma CVD by multi-hollow electrode; 2007年01月 発表情報; 24th Symposium on Plasma Processing 著者; Y.Ohtsu, C.Nakamura, H.Fujita, M.Akiyama and T.Tabaru
Influence of dielectric constant on atmospheric barrier discharge plasma using noble gas; 2007年01月 発表情報; 24th Symposium on Plasma Processing 著者; Y.Ohtsu, N.Yamasaki and H.Fujita
Spatial structure of RF plasma using an internal loop antenna; 2007年01月 発表情報; 24th Symposium on Plasma Processing 著者; H.Fujita, K.Aramaki and Y.Ohtsu
Formation of double layer in RF magnetized inductively coupled plasma with a helical antenna; 2007年01月 発表情報; 24th Symposium on Plasma Processing 著者; H.Fujita, S.Popescu, A.Ishibashi and Y.Ohtsu
Production of high-density capacitively coupled plasma with multi-hollow cathode effect and preparation of a-C:H thin films; 2007年 発表情報; Proc. of The 25th Symposium on Plasma Processing 著者; Y.Ohtsu, C.Nakamura, T.Misawa, H.Fujita, M.Akiyama and K.Yukimura
Inactivation of bacillus subtilis by atmospheric barrier discharge plasma; 2007年 発表情報; Proc. of The 25th Symposium on Plasma Processing 著者; Y.Ohtsu, Y.Misazaki, T.Misawa and H.Fujita
Production of high-density capacitively discharge plasma with multi-hollow electrode for DLC coating; 2007年 発表情報; The 18th Symposium of The Materials Research Society of Japan, 著者; Y.Ohtsu, C. Nakamura, T.Misawa, H.Fujita, M.Akiyama, K.Yukimura,
PLASMA TREATMENT OF POLYMER MATERIAL BY DIELECTRIC BARRIER DISCHARGE WITH MESH ELECTRODE; 2007年 発表情報; The 4th International Workshop on Microplasmas 著者; Y. Ohtsu, K. Kawaguchi and H. Fujita
PRODUCTION OF DIELECTRIC BARRIER DISCHARGE MICROPLASMAS AT VARIOUS OXIDES WITH HIGH SECONDARY ELECTRON EMISSION AND HIGH DIELECTRIC CONSTANT; 2007年 発表情報; The 4th International Workshop on Microplasmas 著者; Y.Ohtsu and H. Fujita
High-density plasma production by capacitively coupled discharge with multi-hollow cathode and secondary electron emission for DLC coating; 2007年 発表情報; Sixth Asian-European International Conference on Plasma Surface Engineering 著者; Y.Ohtsu, C.Nakamura, T.Misawa, H.Fujita, M.Akiyama, T.Tabaru and K.Yukimura,
Preparation of water-repellent film by RF plasma CVD using C2H2F2 gas; 2007年 発表情報; Sixth Asian-European International Conference on Plasma Surface Engineering 著者; Y.Ohtsu, Y.Masuda, S.Yazaki, T.Misawa and H.Fujita
Microplasma generation beyond atmospheric pressure by dielectric barrier discharge with high secondary-electron-emission oxides; 2006年10月 発表情報; 13th Asian Conference on Electrical Discharge 著者; ○ Y.Ohtsu, K.Eura and H.Fujita
Preparation of diamond-like carbon thin films by alternative implantation of plasma ions with different energies; 2006年10月 発表情報; 13th Asian Conference on Electrical Discharge 著者; Y.Ohtsu, C.Nakamura, H.Fujita, M.Akiyama and K.Yukimura
Dynamic potential formation in magnetized inductively coupled plasma; 2006年10月 発表情報; 13th Asian Conference on Electrical Discharge 著者; S. Popescu, A. Ishibashi, Y. Ohtsu and H. Fujita
Bacillus spores sterilization using low temperature oxygen plasma; 2006年10月 発表情報; 13th Asian Conference on Electrical Discharge 著者; D.Vicoveanu(D2), Y. Ohtsu, H.Fujita,
Breakdown characteristics of atmospheric pressure microplasma produced by dielectric barrier discharge with high-secondary-electron-emission oxides; 2006年05月 発表情報; 3rd International Workshop on Microplasmas 2006 著者; Y.Ohtsu, K.Eura and H.Fujita
Preparation of ultra-water-repellent films with pulse-modulated capacitively coupled RF plasma using C2H2F2-Ar mixture gases; 2006年 発表情報; 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing 著者; Y.Ohtsu, S.Yazaki and H.Fujita
Influences of negatively pulse-modulated high-voltage biasing on RF plasma for diamond-like carbon thin film preparation; 2006年 発表情報; 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing 著者; Y.Ohtsu, C.Nakamura, H.Fujita, M.Akiyama and C.Diplasu
Current-Free Double Layer Formation in a Magnetically Enhanced Inductively Coupled Plasma; 2006年 発表情報; 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing 著者; Sebastian Popescu, Ilarion Mihaila, Yasunori Ohtsu and Hiroharu Fujita
Influence of ion-bombardment-energy on thin zirconium oxide film prepared by dual frequency oxygen plasma sputtering; 2005年 発表情報; The 8th International Workshop on Plasma-Based Ion Implantation and Deposition, T3-10
2005.9.19 著者; Y.Ohtsu,Y.Hino,T.Misawa, H.Fujita, K.Yukimura and M.Akiyama
Effect of negative pulsed high-voltage-bias on diamond-like carbon thin film preparation using capacitively coupled RF plasma CVD; 2005年 発表情報; The 8th International Workshop on Plasma-Based Ion Implantation and Deposition, T3-10
中国成都、2005.9.20 著者; Y.Ohtsu, H.Noda, C.Nakamura, T.Misawa, H.Fujita, M.Akiyama and C.Diplasu
Optimization of oxide electrode materials on high-density plasma production for capacitively coupled plasma; 2004年 発表情報; Proc. of The 21Symposium on Plasma Processing 著者; 大津康徳、島添稔博、三沢達也、藤田寛治
Preparation of zirconium oxide thin film on surface of ceramics using inductively coupled plasma reactive sputtering; 2004年 発表情報; Proc. of The 21Symposium on Plasma Processing 著者; 大津康徳、江上正人、三沢達也、藤田寛治、行村 建
High concentration ozone generation with high dielectric materials using a barrier discharge; 2004年 発表情報; Proc. of The 21Symposium on Plasma Processing 著者; 豊福正治(D3)、大津康徳、藤田寛治
Preparation of nanoparticles using rf plasma sputtering with two process modes; 2004年 発表情報; International workshop on plasma nano-technology and its future vision, P-14 著者; Y.Ohtsu, T.Goto, T.Imamura, K.Korenaga, T.Misawa and H.Fujita
Optimization of oxide material electrode for high-density plasma production in capacitively coupled RF discharge; 2004年 発表情報; International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources, p35 著者; Y.Ohtsu, T.Shimazoe, T.Misawa and H.Fujita
Influence of surface state of sputtering target on ZrO2 thin film preparation; 2004年 発表情報; International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources, p89 著者; Y.Ohtsu, M.Egami, T.Misawa, H.Fujita, K.Yukimura, M.Akiyama and T.Tahara
Radio frequency plasma production with external helical antenna in a magnetic field; 2004年 発表情報; 7th Asia Pacific Conference on Plasma Science and Technology, 17th Symposium on Plasma Science for Materials, 29P-94, pp.165 著者; I.Mihaila(D3), Y.Ohtsu and H.Fujita
Preparation of ultra water-repellent thin films by radio frequency plasma CVD using C2H2F2 gas; 2004年 発表情報; 7th Asia Pacific Conference on Plasma Science and Technology, 17th Symposium on Plasma Science for Materials, 30P-22, pp.262 著者; Y.Ohtsu, N.Yamagami, S.Yazaki, T.Misawa and H.Fujita
Preparation of zirconium oxide thin film using reactive inductively coupled plasma sputtering; 2004年 発表情報; 7th Asia Pacific Conference on Plasma Science and Technology, 17th Symposium on Plasma Science for Materials, 30P-23, p.263 著者; Y.Ohtsu, M.Egami, Y.Hino, T.Misawa, H.Fujita, K.Yukimura, M.Akiyama and T.Tabaru
Optimum dielectric constant for high ozone generation with dielectric barrier discharge; 2004年 発表情報; 7th Asia Pacific Conference on Plasma Science and Technology, 17th Symposium on Plasma Science for Materials, 01P-47, p401 著者; M.Toyofuku(D3), Y.Ohtsu and H.Fujita
Influence of oxide material on high density plasma production using capacitively coupled discharge; 2004年 発表情報; 7th Asia Pacific Conference on Plasma Science and Technology, 17th Symposium on Plasma Science for Materials, 01P-78, p.432 著者; Y.Ohtsu, T.Shimazoe, T.Misawa and H.Fujita
Investigation of electron density on light emission in mercury-free electrode-less lamp using inductively coupled discharge; 2004年 発表情報; 7th Asia Pacific Conference on Plasma Science and Technology, 17th Symposium on Plasma Science for Materials, 01P-110, p464 著者; H.Kashiwazaki, Y.Ohtsu and H.Fujita
Influence of magnetic field configuration on plasma structure in an inductively discharge; 2004年 発表情報; The 2nd International School of Advanced Plasma Technology, Poster2
Italy, 2000年9月27日-10月1日 著者; H.Fujita, I.Mihaila and Y.Ohtsu
Preparation of zirconium oxide thin film using plasma sputtering for surface coating of ceramics; 2004年 発表情報; The 2nd International School of Advanced Plasma Technology, Poster3
Italy, 2000年9月27日-10月1日 著者; H.Fujita, Y.Ohtsu, Y.Hino, T.Misawa, K.Yukimura and M.Akiyama
2周波反応性プラズマスパッタリングによるジルコニア薄膜合成に与えるイオン衝撃の効果; 2004年 発表情報; The 15th Symposium of The Materials Research Society of Japan, H1-O14 著者; 大津康徳、日野 譲、三沢達也、藤田寛治、行村 建、秋山守人
C2H2F2容量結合型プラズマCVD法で合成された撥水性薄膜の水滴接触角制御; 2004年 発表情報; The 15th Symposium of The Materials Research Society of Japan,H2-P15 著者; 大津康徳、矢崎伸二、三沢達也、藤田寛治
Instabilities in the Transition Region from CCP to ICP in Electronegative
RF Plasma; 2003年 発表情報; XXVI International Conference on Phenomena in Ionized Gases
Greifswald, Germany, 2003年7月15ー20日 著者; I.Mihaila(D3), Y.Ohtsu and H.Fujita
High-Density Plasma Production with Capacitively Coupled RF Discharge
Using High gamma Coefficient Material Electrodes; 2003年 発表情報; XXVI International Conference on Phenomena in Ionized Gases
Greifswald, Germany, 2003年7月15ー20日 著者;
Y.Ohtsu, T.Shimazoe, T.Misawa and H.Fujita
Ozone Genration with High Dielectric Materials Barrier Discharge
in a Parallelp-Plate System; 2003年 発表情報; XXVI International Conference on Phenomena in Ionized Gases
Greifswald, Germany, 2003年7月15ー20日 著者; M.Toyofuku(D2), Y.Ohtsu and H.Fujita
Preparation of Zirconium Oxide Thin Film Using Inductively Coupled Oxygen
Plasma Sputtering; 2003年 発表情報; 13th International Conference on Surface Modification of Materials by Ion Beams
San Antonio,Texas,USA, 2003年9月21-26日 著者; Y.Ohtsu, M.Egami, T.Misawa, H.Fujita and K.Yukimura
Zirconium Oxide Thin Film Preparation Using Oxygen Inductively Coupled Plasma Sputtering; 2003年 発表情報; 13th International Toki Conference on Plasma Physics and Controlled Nuclear Fusion
土岐,2003年12月9-12日 著者; Y.Ohtsu, M.Egami, T.Misawa, H.Fujita and K.Yukimura
High-Density Plasma Production in Capacitively Coupled RF Discharge
by Means of Oxide Materials Electrodes; 2003年 発表情報; 13th International Toki Conference on Plasma Physics and Controlled Nuclear Fusion
土岐,2003年12月9-12日 著者; Y.Ohtsu, T.Shimasoe, T.Misawa and H.Fujita
Energy Distribution Functions of Ions Impacting on DC and RF Biased Substrate in a NeW
Type ECR Plasma using Ring Shaped Permanent Magnets; 2003年 発表情報; The Third Asia-Pacific International Symposium on the Basic and
Application of Plasma Technology
台北、台湾 2003年12月15-17日 著者; H.Fujita and Y.Ohtsu
Development of Compact Ozonizer by Barrier Discharge for high concentration ozone
generation; 2003年 発表情報; The Third Asia-Pacific International Symposium on the Basic and
Application of Plasma Technology
台北、台湾,2003年12月15-17日 著者; Y.Ohtsu, M.Toyofuku and H.Fujita
Design of rotational RF magnetron sputtering plasma and its characteristics for target utilization saving resources; 2023年10月 発表情報; 76th Annual Gaseous Electronics Conference, Bulletin of the American Physical Society (2023), Michigan,, HT1.1 著者; Yasunori Otsu, Md. Amzad Hossain, Julian Schulze
Plasma fundamentals and its application for material processing; 2017年01月 発表情報; Special lecture in Rajshahi University of Engineering and Technology, Bangladesh, Jan. 26, 2017 著者; Md. Amzad Hossain and Yasunori Ohtsu
Production of plasma sources by capacitively coupled discharge plasma(CCP) for functional thin film preparation; 2015年12月 発表情報; Special lecture on Plasma Physics and Technology, West Virginia University, USA 著者; Yasunori Ohtsu
High-density RF plasma by hollow cathode for plasma processing; 2011年10月 発表情報; 4st International Workshop on Plasma Scientech for All Something(Plasas-4),October 8-10,2011,Beijing,China 著者; 大津康徳