日本語フィールド
著者：大津康徳題名：プラズマコーティングによる撥水性薄膜合成とその応用発表情報：電気学会論文誌Ａ特集解説 巻: 130 号: 1 ページ: 6-9キーワード：プラズマコーティング，撥水性膜，高密着性，自動車フロントガラス，陶磁器概要：抄録：The preparation of water-repellent films by plasma-coating has been reviewed and then unique applications of the hydrophobic films are also introduced. Ultra-water-repellent films with a water contact angle of 150 degree have been synthesized by capacitively couple plasma enhanced chemical vapor deposition using C2H2F2 / Ar mixture gases for next generation automobile window. Scanning electron microscopy shows that the prepared films have an irregular rough microstructure in which particles of submicron diameter are complicatedly intertwined. Fourier-transform infrared spectroscopy indicates that the films include components of the C–H and C–F bonds, characterized by having a hydrophobic nature. A zirconium oxide (ZrO2) thin film was prepared using oxygen inductively coupled plasma sputtering of the zirconium target with a negative bias for protecting china from metallic contamination. It is found that the prepared ZrO2 films have water-repellent nature with contact angle of about 100 degree.英語フィールド
Author：Yasunori OhtsuTitle：Preparation of Water-Repellent Films by Plasma-Coating and its ApplicationAnnouncement information:Trans. IEE Jpn, A Vol: 130 Issue: 1 Page: 6-9Keyword：plasma coating, water repellent film, adhesion, automobile window, chinaAn abstract：The preparation of water-repellent films by plasma-coating has been reviewed and then unique applications of the hydrophobic films are also introduced. Ultra-water-repellent films with a water contact angle of 150 degree have been synthesized by capacitively couple plasma enhanced chemical vapor deposition using C2H2F2 / Ar mixture gases for next generation automobile window. Scanning electron microscopy shows that the prepared films have an irregular rough microstructure in which particles of submicron diameter are complicatedly intertwined. Fourier-transform infrared spectroscopy indicates that the films include components of the C–H and C–F bonds, characterized by having a hydrophobic nature. A zirconium oxide (ZrO2) thin film was prepared using oxygen inductively coupled plasma sputtering of the zirconium target with a negative bias for protecting china from metallic contamination. It is found that the prepared ZrO2 films have water-repellent nature with contact angle of about 100 degree.