教員活動データベース

Spatial structure of radio-frequency capacitive discharge plasma with ring-shaped hollow electrode using Ar and O2 mixture gases

著者：

Yasunori Ohtsu, Masaya Takasaki and Julian Schulze

題名：

発表情報：

Journal of Physics D: Applied Physics 巻: 52 号: 35 ページ: 355202-1-7

キーワード：

概要：

抄録：

Author：

Yasunori Ohtsu, Masaya Takasaki and Julian Schulze

Title：

Spatial structure of radio-frequency capacitive discharge plasma with ring-shaped hollow electrode using Ar and O2 mixture gases

Announcement information:

Journal of Physics D: Applied Physics Vol: 52 Issue: 35 Page: 355202-1-7