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Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization

著者：

Yasunori Ohtsu, Takahiro Nakashima, Rei Tanaka and Julian Schulze

題名：

発表情報：

Vacuum, In progress (November 2020) 巻: 181 ページ: 109593-1-10

キーワード：

概要：

抄録：

Author：

Yasunori Ohtsu, Takahiro Nakashima, Rei Tanaka and Julian Schulze

Title：

Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization

Announcement information:

Vacuum, In progress (November 2020) Vol: 181 Page: 109593-1-10