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Characteristics of a hybrid radio-frequency capacitively and inductively coupled plasma using hydrogen gas

著者：

Yasunori Ohtsu, Tatsuo Tabaru and Julian Schulze

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発表情報：

Journal of Vacuum Science and Technlogy B 巻: 42 号: 4 ページ: 044204(8pp)

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概要：

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Author：

Yasunori Ohtsu, Tatsuo Tabaru and Julian Schulze

Title：

Characteristics of a hybrid radio-frequency capacitively and inductively coupled plasma using hydrogen gas

Announcement information:

Journal of Vacuum Science and Technlogy B Vol: 42 Issue: 4 Page: 044204(8pp)