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Rotational cross-shaped magnetized radio-frequency sputtering plasma source for uniform circular target utilization

著者：

Tsubasa Ide, Md. Amzad Hossain, Yutaro Nakamura and Yasunori Ohtsu

題名：

発表情報：

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 巻: 35 ページ: 061312(6pp)

キーワード：

概要：

抄録：

Author：

Tsubasa Ide, Md. Amzad Hossain, Yutaro Nakamura and Yasunori Ohtsu

Title：

Rotational cross-shaped magnetized radio-frequency sputtering plasma source for uniform circular target utilization

Announcement information:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Vol: 35 Page: 061312(6pp)