日本語フィールド
著者：Yasunori OHTSU, Godai Sakata, Julian Schulze, Takeshi Yasunaga and Yasuyuki Ikegami題名：Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al_2O_3 - ZnO targets発表情報：Japanese Journal of Applied Physics, 61, SI, pp.SI1005(2022)キーワード：概要：抄録：英語フィールド
Author：Yasunori OHTSU, Godai Sakata, Julian Schulze, Takeshi Yasunaga and Yasuyuki IkegamiTitle：Spatial profile of Al-ZnO thin film on polycarbonate deposited by ring-shaped magnetized rf plasma sputtering with two facing cylindrical Al_2O_3 - ZnO targetsAnnouncement information:Japanese Journal of Applied Physics, 61, SI, pp.SI1005(2022)