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Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets

著者：

Yasunori Ohtsu, Takeshi Uchida, Ryohei Kuno and Julian Schulze

題名：

発表情報：

J. Vac. Sci. Technol. A 巻: 42 号: 3 ページ: 033011

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概要：

抄録：

Author：

Yasunori Ohtsu, Takeshi Uchida, Ryohei Kuno and Julian Schulze

Title：

Production of a high-density hydrogen plasma in a capacitively coupled RF discharge with a hollow cathode enclosed by magnets

Announcement information:

J. Vac. Sci. Technol. A Vol: 42 Issue: 3 Page: 033011