日本語フィールド
著者：Yasunori Ohtsu, Rei Tanaka and Takahiro Nakashima題名：Development of rotational maze-shaped RF magnetron plasma for successful target utilization and the thin film preparation発表情報：Japanese Journal of Applied Physics, Special Issue: Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials 巻: 60 号: SA ページ: SAAB01-1-7キーワード：概要：抄録：英語フィールド
Author：Yasunori Ohtsu, Rei Tanaka and Takahiro NakashimaTitle：Development of rotational maze-shaped RF magnetron plasma for successful target utilization and the thin film preparationAnnouncement information:Japanese Journal of Applied Physics, Special Issue: Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials Vol: 60 Issue: SA Page: SAAB01-1-7