日本語フィールド
著者:Yasunori Otsu, Md. Amzad Hossain, Julian Schulze題名:Design of rotational RF magnetron sputtering plasma and its characteristics for target utilization saving resources発表情報:76th Annual Gaseous Electronics Conference, Bulletin of the American Physical Society (2023), Michigan, ページ: HT1.1キーワード:概要:抄録:英語フィールド
Author:Yasunori Otsu, Md. Amzad Hossain, Julian SchulzeTitle:Design of rotational RF magnetron sputtering plasma and its characteristics for target utilization saving resourcesAnnouncement information:76th Annual Gaseous Electronics Conference, Bulletin of the American Physical Society (2023), Michigan, Page: HT1.1