日本語フィールド
著者:Md. Amzad Hossain, Yasunori Ohtsu and Tatsuo Tabaru題名:Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing発表情報:Plasma Chem Plasma Process,(2017). 巻: 37 号: 6 ページ: 1663-1677キーワード:概要:抄録:英語フィールド
Author:Md. Amzad Hossain, Yasunori Ohtsu and Tatsuo TabaruTitle:Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials ProcessingAnnouncement information:Plasma Chem Plasma Process,(2017). Vol: 37 Issue: 6 Page: 1663-1677