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Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing

著者：

Md. Amzad Hossain, Yasunori Ohtsu and Tatsuo Tabaru

題名：

発表情報：

Plasma Chem Plasma Process,(2017). 巻: 37 号: 6 ページ: 1663-1677

キーワード：

概要：

抄録：

Author：

Md. Amzad Hossain, Yasunori Ohtsu and Tatsuo Tabaru

Title：

Performance of a Gyratory Square-Shaped Capacitive Radio Frequency Discharge Plasma Sputtering Source for Materials Processing

Announcement information:

Plasma Chem Plasma Process,(2017). Vol: 37 Issue: 6 Page: 1663-1677