教員活動データベース

Sustaining mechanism and spatial structure of high-density ring-shaped hollow cuspate magnetized rf plasma for low-pressure plasma processing

著者：

Y.Ohtsu and T. Yanagise

題名：

発表情報：

Plasma Sources Science and Technology, Special Issue on Electron heating in technological plasmas 巻: 24 号: 3 ページ: 034005(9pp)

キーワード：

概要：

抄録：

Author：

Y.Ohtsu and T. Yanagise

Title：

Sustaining mechanism and spatial structure of high-density ring-shaped hollow cuspate magnetized rf plasma for low-pressure plasma processing

Announcement information:

Plasma Sources Science and Technology, Special Issue on Electron heating in technological plasmas Vol: 24 Issue: 3 Page: 034005(9pp)