日本語フィールド
著者：宮崎 則幸;内田 仁;萩原 世也;宗像 健;福田 承生題名：チョコラルスキー法によるバルク単結晶成長過程の熱応力解析 異方性解析と等方性解析の比較発表情報：日本機械学会論文集 A編 巻: 57 号: 536 ページ: 858 - 863キーワード：概要：A three-dimensional finite element proqram is developed for calculating thermal stress in bulk single crystals during Czochralski growth. Elastic anisotropy is taken into account in this program. Thermal stress analyses of a GaAs bulk single crystal are performed in the cases of [001] and [111] pulling directions using its temperature distribution obtained from a heat conduction analysis and its material properties. The stress component and the parameter representing dislocation density are compared between the anisotropic analysis taking account of elastic anisotropy and the isotropic analysis using the Young's modulus and the Poisson's ratio in the {111} plane. Significant differences are found in their values and distribution patterns between both analyses.抄録：英語フィールド
Author：MIYAZAKI Noriyuki;UCHIDA Hitoshi;HAGIHARA Seiya;MUNAKATA Tsuyoshi;FUKUDA TsuguoTitle：Thermal stress analysis of bulk single crystal during Czochralski growth. Comparison between anisotropic analysis and isotropic analysis.Announcement information:Transactions of the Japan Society of Mechanical Engineers Series B Vol: 57 Issue: 536 Page: 858 - 863An abstract：A three-dimensional finite element proqram is developed for calculating thermal stress in bulk single crystals during Czochralski growth. Elastic anisotropy is taken into account in this program. Thermal stress analyses of a GaAs bulk single crystal are performed in the cases of [001] and [111] pulling directions using its temperature distribution obtained from a heat conduction analysis and its material properties. The stress component and the parameter representing dislocation density are compared between the anisotropic analysis taking account of elastic anisotropy and the isotropic analysis using the Young's modulus and the Poisson's ratio in the {111} plane. Significant differences are found in their values and distribution patterns between both analyses.