日本語フィールド
著者:Qixin Guo*, Junya Tetsuka, Zewei Chen, Makoto Arita, Katsuhiko Saito, Tooru Tanaka題名:Temperature dependence of crystalline quality in MgGa2O4 films by oxygen radicals-assisted pulsed laser deposition発表情報:Materials Science in Semiconductor Processing,178, 108465 (2024).キーワード:概要:抄録:英語フィールド
Author:Qixin Guo*, Junya Tetsuka, Zewei Chen, Makoto Arita, Katsuhiko Saito, Tooru TanakaTitle:Temperature dependence of crystalline quality in MgGa2O4 films by oxygen radicals-assisted pulsed laser depositionAnnouncement information:Materials Science in Semiconductor Processing,178, 108465 (2024).