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Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition

著者：

Fabi Zhang, Congyu Hu, Makoto Arita, Katsuhiko Saito, Tooru Tanaka , and Qixin Guo*

題名：

発表情報：

AIP Advances 10, 065125 (2020)

キーワード：

概要：

抄録：

Author：

Fabi Zhang, Congyu Hu, Makoto Arita, Katsuhiko Saito, Tooru Tanaka , and Qixin Guo*

Title：

Impacts of oxygen radical ambient on structural and optical properties of (AlGa)2O3 films deposited by pulsed laser deposition

Announcement information:

AIP Advances 10, 065125 (2020)