日本語フィールド
著者:Y.Ohtsu, H.Urasaki, T.Misawa and H. Fujita題名:Development of high-density radio frequency plasma source with ring-shaped hollow electrode for dry processing発表情報:Proc. of 31th International Symposium on Dry process.キーワード:概要:抄録:英語フィールド
Author:Y.Ohtsu, H.Urasaki, T.Misawa and H. FujitaTitle:Development of high-density radio frequency plasma source with ring-shaped hollow electrode for dry processingAnnouncement information:Proc. of 31th International Symposium on Dry process.