日本語フィールド
著者:T.Oishi, T.Takami, K.Kojima, K.Kuroda, and O.Wada題名:Dry etching of BiSrCaCuO superconducting thin films using argon and ethane発表情報:Proceedings of the 5th International symposium on superconductivity (ISS '92), November 16-19, 1992, Kobe, Japan, pp.1029-1032.キーワード:概要:抄録:英語フィールド
Author:T.Oishi, T.Takami, K.Kojima, K.Kuroda, and O.WadaTitle:Dry etching of BiSrCaCuO superconducting thin films using argon and ethaneAnnouncement information:Proceedings of the 5th International symposium on superconductivity (ISS '92), November 16-19, 1992, Kobe, Japan, pp.1029-1032.