教員活動データベース

Spatial structures of rf ring-shaped magnetized sputtering plasmas with two facing cylindrical ZnO/Al2O3 targets

著者：

Yasunori Ohtsu, Kousuke Hara, Shoma Imoto, Julian Schulze, Takeshi Yasunaga, and Yasuyuki Ikegami

題名：

発表情報：

Japanese Journal of Applied Physics 巻: 62 ページ: SI1007

キーワード：

概要：

抄録：

Author：

Yasunori Ohtsu, Kousuke Hara, Shoma Imoto, Julian Schulze, Takeshi Yasunaga, and Yasuyuki Ikegami

Title：

Spatial structures of rf ring-shaped magnetized sputtering plasmas with two facing cylindrical ZnO/Al2O3 targets

Announcement information:

Japanese Journal of Applied Physics Vol: 62 Page: SI1007