日本語フィールド
著者:Qixin Guo, Yuta Matsushima, Yaliu Ding, Tooru Tanaka, Mitsuhiro Nishio題名:Effects of growth parameters on surface roughness of rf magnetron sputtered Al films発表情報:10th International Symposium on Sputtering and Plasma Processses (ISSP2009), Kanazawa, July 8-9, 2009, TF P3-11, p.563-566キーワード:概要:抄録:英語フィールド
Author:Qixin Guo, Yuta Matsushima, Yaliu Ding, Tooru Tanaka, Mitsuhiro NishioTitle:Effects of growth parameters on surface roughness of rf magnetron sputtered Al filmsAnnouncement information:10th International Symposium on Sputtering and Plasma Processses (ISSP2009), Kanazawa, July 8-9, 2009, TF P3-11, p.563-566