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Characterizations of Zr₁_–_XAl_XN films synthesized from sintered ZrN-based targets

著者：

C. So, Y. Kitamika, H. Hasegawa

題名：

発表情報：

12th Asian-European　International Conference on Plasma Surface Engineering (AEPSE2019) 巻: S4-PO03

キーワード：

概要：

抄録：

Author：

C. So, Y. Kitamika, H. Hasegawa

Title：

Characterizations of Zr₁_–_XAl_XN films synthesized from sintered ZrN-based targets

Announcement information:

12th Asian-European　International Conference on Plasma Surface Engineering (AEPSE2019) Vol: S4-PO03